In this study, a mems vibratory gyroscope is analyzed. System identification of mems vibratory gyroscope sensor article pdf available in mathematical problems in engineering 121024123x. Draper tuning fork gyroscope advancements and applications. The closedloop with a single automatic gain control agc loop is chosen to maintain the vibration speed stable, and then the closedloop with agc is analyzed to obtain its. Transient response and stability of the agcpi closedloop. Silicon sensings mems gyros all use the same unique patented vsg resonating ring technology to sense. The majority of commercial mems gyroscopes are operated in a modesplit condition where the drive and sense modes are intentionally mismatched in frequency, thus prioritizing gain stability and allowing for wide bandwidth but often sacrificing the noise density. Mems gyroscope technology provides cost effective method for improving directional estimation and overall accuracy in the navigation systems. Mscengmech march2008 this thesis aims to contribute to themodellingand analysisofmems gyroscope technologies. An analog circuit model for drive mode of mems vibratory. Acar et al environmentally robust mems vibratory gyroscopes for automotive applications 1899 fig. Apr 14, 2016 modematched mems coriolis vibratory gyroscopes.
The bulk of literature on mems vibratory gyroscopes deals with different. Here the gyroscope consisted of a single mass oscillating longitudinally with rotation induced lateral deflections being sensed capacitive 6. While a planar, axis vibratory gyroscope is z the focus of the explanation, the discussions are generic in nature and equally apply to devices with other. Driving sensing m s k k d c s d c 2 dof z x y z x y. Mems gyroscope provides precision inertial sensing in harsh. Vibratory gyroscopes cvg is an ongoing research topic. Effect of temperature on mems vibratory rate gyroscope. Pdf system identification of mems vibratory gyroscope sensor. This paper presents a novel adaptive approach that can identify, in an online fashion, angular rate and other system parameters. Pdf performance of mems vibratory gyroscope under harsh.
Design and analysis of mems gyroscope comsol multiphysics. In this paper, the design process of a new model predictive control mpc for forcebalancing operation mode of a vibratory microelectromechanicalsystem mems gyroscope is investigated. Mems vibratory gyroscope mvg is a device used to detect and measure external angular velocity or rotational angle of an object relatively rotated in an inertial frame of reference 1, 2. Design and fabrication, are the tuning fork gyroscope and the vibrating ring. Design and performance test of a mems vibratory gyroscope with a novel agc force rebalance control.
The core of the closedloop is to keep the vibration speed stable by adding driving force offset the damping force. Mems vibratory gyroscopes structural approaches to improve robustness. The jpl mems gyroscope is an enabling technology for a variety of commercial, space and military applications. Based on the internal model principle, a robust repetitive. Vibration sensitivity analysis of mems vibratory ring.
A vibrating structure gyroscope functions much like the halteres of flies insects in the order diptera. Mems gyroscope a gyroscope is a device for measuring or maintaining the orientation, based on the principles of the conservation of momentum. Structural approaches to improve robustness mems reference shelf. The fabrication of a memsbased translational vibratory z. Micro machined gyroscopes use vibrating mechanical elements proofmass to sense rotation. Electrical coupling suppression and transient response improvement for a microgyroscope using afd with a 2dof pid controller j cui, z y guo, z c yang et al. May 01, 2015 mems vibratory gyroscope simulation and sensitivity analysis kanwar 2015 1. Dreyer department of mechanicalandmechatronic engineering, university ofstellenbosch, private bag x1,7602matieland,southafrica thesis. Mems vibratory gyroscopes structural approaches to. Fabrication defects and perturbations affect the behavior of a vibratory mems gyroscope sensor, which makes it difficult to measure the rotation angular rate. Pdf modeling and simulation of the mems vibratory gyroscope.
A comparative study of conventional singlemass and amplitude. Modelling of mems vibratory gyroscopes utilizing phase. The vibratory sensor element is sometimes referred to as a proof mass and is modeled as a mass that oscillates along an axis to stretch and compress one or more springs. Mems gyroscope provides precision inertial sensing in harsh, high temperature environments. One of these gyroscopes is the piezoelectric plate gyroscope which uses a pzt plate as its base. Design and simulation of mems piezoelectric gyroscope. Since the mems device and circuit are interactively related, the entire system should be analyzed together to design or test the gyroscope.
Mems vibratory gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. Silicon sensings mems gyros all use the same unique patented vsg resonating ring technology to sense rotation rate through a phenomenon known as coriolis. Model predictive control of mems vibratory gyroscope. The timeaverage method currently available is limited to analyzing the specific performance of the automatic gain controlproportional and integral agcpi based velocitycontrolled closedloop in a microelectromechanical systems mems vibratory gyroscope, since it is hard to solve nonlinear functions in the time domain when the control loop reaches to 3rd. Pdf simulation of the mems vibratory gyroscope through. Mems vibratory gyroscopes are increasingly used in applications ranging from consumer electronics to aerospace and are now one of the most common mems products after accelerometers. Control of mems coriolis vibratory gyroscopes page 2 theoretical background a gyroscope is an inertial device for measuring the angle of orientation or angular rate of rotation with respect to the inertial frame of reference. The memsbased vibratory gyroscope system has three parts, namely the mems structure as sensing element, the driving and sensing circuits, and systems packaging. A comparative study of conventional singlemass and amplitude ampli. It uses vibrating mechanical element to sense the rotation. Dynamic analysis of a single mems vibratory gyroscope with.
Vibratory gyroscope article about vibratory gyroscope by. A simplified model of vibratory gyros is shown in figure 1. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common microfabrication processes and. In this sectionthe principles of operation of vibratory gyroscopes are derived from the basic, concepts of classical mechanics. To investigate the real behavior of the gyroscope sensor, the cubic stiffness coefficient is considered.
Modelling of mems vibratory gyroscopes utilizing phase detection a. Mems vibratory gyroscopes structural approaches to improve. This method, which in the past has been used to try to build macroscale. Us9459100b2 stepped sinusoidal drive for vibratory. The electrodes are used for drive, sense, or control of the gyro. Request pdf effect of temperature on mems vibratory rate gyroscope we report the temperature dependence of the jplboeing mems second generation post resonator gyroscopes and determine the. Pdf microelectromechanical systems mems gyroscope is a sensor that measures the rate of change in an angular position of an object. Dynamic analysis of a single mems vibratory gyroscope with decoupling connection between driving frame and sensing proof mass. This paper presents a mpc model predictive control algorithm for mems vibratory gyroscopes based on forcebalancing control strategy. This separates gyros from any other means of measuring rotation, such as a tachometer or potentiometer.
Shkel microsystems laboratory university of california, irvine, ca 92697, usa email. Frequency response showing superimposed drive and sense modes. Mems vibratory gyroscopes structural approaches to improve robustness cenk acar and andrei shkel isbn. This understanding is essential for realization of micro electro. Vibratory gyroscope an instrument for determining the angular velocity of an object. A project report on mems vibratory gyroscope simulation and sensitivity analysis submitted to. While the mems vibratory gyroscope sensing element has three parts, each of which is connected via a. Vibratory gyroscopes basic vibratory gyroscope operation. Gyroscopes are needed for inertial navigation and precision instrument pointing. Modelbased control concepts for vibratory mems gyroscopes. There are bar and rotor types of vibratory gyroscope. Most of the work being done is in the area of vibratory gyroscopes, which have no moving parts and require less power than traditional rotational schemes.
Structural approaches to improve robustness mems reference shelf acar, cenk, shkel, andrei on. Precision resonant vibratory mems sensors navigation and. Design and analysis of a mems comb vibratory gyroscope. Mems vibratory gyroscopes is a must have book for engineers in both industry and academia who specialize in the design and manufacture of gyroscopes. The dualmass gyroscope demonstrates a better noise performance in the openloop ratemode with this material is based on work supported by the defense advanced research projects agency and u. Mems vibratory gyroscope simulation and sensitivity analysis. In the first part, the dynamics of the vibratory gyroscope sensing element is. A vibrating structure gyroscope functions much like the halteres of flies insects in the order diptera the underlying physical principle is that a vibrating object tends to continue vibrating in the same plane even. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common. Preethi1 1rajalakshmi engineering college, chennai, india abstract mems gyroscope technology provides cost effective method for improving directional estimation and overall accuracy in the navigation systems. The basic construction and principles of operation are explained briefly below.
Pdf model predictive control of mems vibratory gyroscope. System identification of mems vibratory gyroscope sensor. In this paper, an analog circuit model for the drive mode of a twodegreeoffreedom mems vibratory gyroscope is presented. Pdf with advances in fabrication technologies lowering cost, mems gyroscopes are being used in an ever wider variety of applications. In this paper, we will look at two other types of gyros. The most common mems gyroscope is the cvg which is a massspringdamper. Sem image of fabricated silicononinsulator multidof sensemode gyroscope. The operation of this sensor is based on the coriolis principle to transform energy from primary mode to secondary.
Environmentally robust mems vibratory gyroscopes for. The operation of the ring gyroscope relies on two elliptically shaped vibration modes, named the primary and secondary flexural modes, which are also. Ece, tongji university, shanghai, china, june, 2005 042009 thesis advisor. This paper presents a tuning fork gyroscope tfg 1 with a perforated proof mass. Quadratureinduced noise in coriolis vibratory gyroscopes. The operating principle of mems vibratory gyroscopes involves the rotation. The principle of drive closedloop for tuning fork comb mems vibratory gyroscope is analyzed. A vibratory ring gyroscope consists of a ring structure, supportspring structures, and electrodes surrounding the ring structure. The sensing element in the bar type is formed by several vibrating objects similar to the bars of a tuning fork. A comparative study of conventional singlemass and. System identification of mems vibratory gyroscope sensor article pdf available in mathematical problems in engineering 121024123x september 2011 with 216 reads how we measure reads. Design and fabrication, are the tuning fork gyroscope and the vibrating ring gyroscope.
Silicon sensing produced the first mems vsg in the late 1990s, since then well over 20,000,000 mems gyros. The ip for jpls disc resonating gyroscope drg has been licensed. This proposed circuit can be a suitable test bench for. Precision resonant vibratory mems sensors navigation and science. Gyroscopes are commonly used sensors for measuring angular velocity in many areas of applications such as navigation, homing, and control. Microelectromechanical systems mems vibratory gyroscopes are among the most commercialized mems products. Selvakumar rajalakshmi engineering college, chennai 602105 india email. Forcebalancing model predictive control of mems vibratory. Among various mems sensors, a rate gyroscope is one of the most complex. Analysis and design of drive closedloop for mems vibratory. Transfer of energy between two vibrating resonator is by coriolis acceleration. A study on resonant frequency and q factor tunings for mems.
A unique balance between theory and practical design issues. This model is implemented on a printed circuit board by analog integrated circuits. A mems gyroscope typically includes a vibratory gyroscopic sensor element that oscillates along a first axis at a predetermined frequency. Typically vibratory gyroscopes utilize coriolis acceleration fictional force due to rotating reference frame. The proposed approach develops an online identifier scheme, by rewriting the dynamic model of. The proposed approach develops an online identifier scheme, by rewriting the dynamic model of mems gyroscope. In modematched operation, the gyroscope gain depends on sensemode qfactor, which. A vibrating structure gyroscope, defined by the ieee as a coriolis vibratory gyroscope cvg, is a gyroscope that uses a vibrating structure to determine the rate of rotation. Nguyen 111808 8 principle of operation tuning fork gyroscope. Mems vibratory gyroscope simulation and sensitivity analysis kanwar 2015 1. A good description of the working of a basic angular rate gyroscope can be found in clark, et. Dec 16, 2008 mems vibratory gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. A study on resonant frequency and q factor tunings for mems vibratory gyroscopes x y z.
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